Scanning Electron Microscopy Lab
(Duke Centennial Hall 240)
JEOL JSM 6480 Scanning Electron Microscope
- Tungsten hairpin filament.
- Spatial resolution at 30 kV of 3 nm for secondary electron image, and 4 nm for backscattered electron image.
- Magnification ranging from 8× to 300,000×.
- Accelerating voltage adjustable from 0.3 kV to 30 kV.
- 5-axis sample stage capable of eucentric rotation and tilt.
- Maximum 8-inch wafer loadable.
- Equipped with Oxford Instruments INCA energy dispersive X-ray spectroscope (EDS) system capable of qualitative analysis (element identification), quantitative analysis (element concentration), and microanalysis (spot analysis, linescan, and areal mapping).
Denton Desk IV-TCS Sputter Coater
- 6” OD steel chamber with viewport
- 2” diameter rotating stage with pre-drilled stub holes
- Enhanced touchpad control with graphics capability
- 60 l/s turbo molecular pump\two stage, direct drive, 85 lpm mechanical pump
- 0-100 mA power supply
- Ultimate vacuum of ~5×10-6 torr
- Specimens are protected from damage by the anode grid with the magnetron sputterhead to collect stray electrons, preventing them from bombarding/heating the sample
- Capable of sputtering all metals with fine grained films
- Carbon evaporation accessories are available for carbon deposition