Fabrication Process Procedures

General Procedures	Clean Room Gowning Procedures	PPT\|PDF
	Procedure – Orbital Tube Welder PP format	PPT\|PDF
	Procedure – DI Water	DOC

Cleaning	Procedure -Single Wager Piranha Clean- single page	DOCx\|PDF

Photolithography	Headway Spin Coater with PWM32 Controller	PDF

	Using POSITIVE photoresist
	Photolithography Microposit 1813 Positive PR
	+ 354 Positive PR Developer	DOC\|PDF
	Solitec High Speed Spin Processor	DOC\|PDF
	HTG Mask Aligner	D OC\|PDF
	Solitec Spray Developer + Microposit 354 Positive PR Developer	D OC\|PDF
	Photoresist Strip Procedure for Microposit 1813 Positive PR	D OC\|PDF

	Using NEGATIVE photoresist
	NFR-016 Negative PR Liftoff Process	DOC\|PDF
	NFR-014 Negative PR Vertical Wall Process	DOC\|PDF
	Photolithography Negative PR & Negative PR Developer*	DOC\|PDF
	Solitec High Speed Spin Processor	DOC\|PDF
	HTG Mask Aligner	DOC\|PDF
	Solitec Spray Developer with Negative PR Developer*	DOC\|PDF
	Photoresist Strip Procedure for Negative PR*	DOC\|PDF
	* [PENDING]

Etching	Photoresist stripping using O₂ plasma	DOC\|PDF
	Anisotropic Etch	PDF
	Efficient process development for bulk Si etching using
	cellular automata simulation techniques	PDF
	Silicon Etching	PDF
	KOH Etching and Decontamination Procedures	DOC\|PDF
	Bulk Micromachining	DOC\|PDF
	Recipe for silicon mask etching	DOC\|PDF

Thin Film Deposition	CVC Sputter Tool (DC sputtering of Aluminum films)	DOC
	CVC Sputter Tool (RF sputtering)	DOC\|PDF
	AJA Sputter Tool (For depositing metal films)	DOC\|PDF
	Varian 3125 – Procedure for e-beam evaporation in auto-mode	DOC\|PDF
	Schematic – Sputtering of thin films	JPG\|PNG
	Schematic – E-Beam evaporation of thin films	JPG\|PNG

Metrology	Alpha Step Tool	DOC\|PDF
	Filmetrics F20 Thin-Film Analyzer	DOC
	Procedure – 4 point probe using Keithley Pro-4.ppt	PPT

Wafer Cutting	Micro Automation (Wafer Dicing Saw)	DOC\|PDF

DC Testing	PN-Junction DC Measurement	DOC\|PDF

Thermal Processing	AG 210 RTP	DOC\|PDF